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- L. M. Spellman (Porter), R. C. Glass, R. F. Davis, T. P. Humphreys, R. J. Nemanich, K. Das, and S. Chevacharoenkul, “Electrical Characterization of Epitaxial Titanium Contacts to Alpha (6H) Silicon Carbide,” (presented at the Fourth International Conference on Amorphous and Crystalline Silicon Carbide, Santa Clara, CA, 1991) in C. Y. Yang, M. M. Rahman, and G. L. Harris (eds.), Springer Proceedings in Physics, Vol. 71: Amorphous and Crystalline Silicon Carbide IV, Springer-Verlag, pp. 417-422.
- R.
C. Glass, L. M. Spellman (Porter), and R. F. Davis, “Low
energy ion-assisted deposition of titanium nitride ohmic contacts
on alpha (6H)-silicon carbide,” Appl. Phys. Lett. 59
(22), 2868-2870 (1991).
- L.
M. Spellman (Porter), R. C. Glass, R. F. Davis, T. P. Humphreys,
H. Jeon, R. J. Nemanich, S. Chevacharoenkul, and N. R. Parikh, “Heteroepitaxial Growth and Characterization of Titanium
Films on Alpha (6H) Silicon Carbide,” Mat. Res. Soc.
Symp. Proc. 221, 99-104 (1991).
- R.
C. Glass, L. M. Spellman (Porter), S. Tanaka, and R. F. Davis, “Chemical and structural analyses of the titanium nitride/alpha
(6H)-silicon carbide interface,” J. Vac. Sci. Technol.
A 10 (4), 1625-1630 (1992).
- L.
M. Porter, R. C. Glass, R. F. Davis, J. S. Bow, M. J. Kim,
and R. W. Carpenter, “Chemical and electrical mechanisms
in titanium, platinum and hafnium contacts to alpha (6H) silicon
carbide,” Mat. Res. Soc. Symp. Proc. 282, 471-477 (1993).
- L.M.
Porter, R.F. Davis, J.S. Bow, M.J. Kim, and R.W. Carpenter, “Deposition and characterization of Schottky and ohmic
contacts on n-type alpha (6H)-SiC (0001),”(presented
at the Fifth International Conference on Silicon Carbide and
Related Materials, Washington, D.C., 1993) in M.G. Spencer
et al. (eds.), Institute of Physics Conference Series, Vol.
137: Silicon Carbide and Related Materials, Institute of Physics
Publishing, pp. 581-584.
- J. S. Bow, L. M. Porter, M. J. Kim, R. W. Carpenter, and R.
F. Davis, “Thin film Ti/6H-SiC interfacial reaction:
high spatial resolution electron microscopy study,” Ultramicroscopy 52, 289-296 (1993).
- J.S. Bow, L.M. Porter, M.J. Kim, R.W. Carpenter, and R.F.
Davis, “High spatial reso-lution TEM study of thin film
metal/6H-SiC interfaces,” Mat. Res. Soc. Symp. Proc.
280, 571-576 (1993).
- L.M. Porter, J.S. Bow, M.J. Kim, R.W. Carpenter, and R.F.
Davis, “Characterization of contacts to n- and p-type
alpha (6H) silicon carbide (0001),” Trans. Of the Second
Int. High Temperature Electronics Conf., Charlotte, N.C.,
June 1994, p. XIII-3.
- C. Raynaud, F. Ducroquet, G. Guillot, L. M. Porter, and R.
F. Davis, “Determination of ionization energies of the
nitrogen donors in 6H-SiC by admittance spectroscopy,” J. Appl. Phys. 76 (3), 1956-1958 (1994).
- P. K. Baumann, T. P. Humphreys, R. J. Nemanich, K. Ishibashi,
N. R. Parikh, L. M. Porter, and R. F. Davis, “Epitaxial
Cu contacts on semiconducting diamond,” Diamond and
Related Materials 3, 883-886 (1994).
- L. M. Porter, J. S. Bow, M. J. Kim, R. W. Carpenter, and R.
F. Davis, “Chemistry, microstructure, and electrical
properties at interfaces between thin films of cobalt and
alpha (6H) silicon carbide (0001),” J. Mater. Res.
10 (1), 26-33 (1995).
- C. Raynaud, C. Richier, P. N. Brounkov, F. Ducroquet, G. Guillot,
L. M. Porter, R. F. Davis, C. Jaussaud, and T. Billon, “Determination
of donor and acceptor level energies by admittance spectroscopy
in 6H-SiC,” Mater. Sci. Eng. B 29, 122-125 (1995).
- F. Gendron, L. M. Porter, C. Porte, and E. Bringuier, “Hydrogen
passivation of donors and acceptors in SiC,” Appl. Phys.
Lett. 67 (9), 1253-1255 (1995).
- L. M. Porter, J. S. Bow, M. J. Kim, R. W. Carpenter, R. C.
Glass, and R. F. Davis, “Chemistry, microstructure,
and electrical properties at interfaces between thin films
of titanium and alpha (6H) silicon carbide (0001),” J. Mater. Res. 10 (3), 668-679 (1995).
- L. M. Porter, J. S. Bow, M. J. Kim, R. W. Carpenter, and R.
F. Davis, “Chemistry, microstructure, and electrical
properties at interfaces between thin films of platinum and
alpha (6H) silicon carbide (0001),” J. Mater. Res. 10
(9), 2336-2342 (1995).
- L. M. Porter and R. F. Davis, “A critical review of
ohmic and rectifying contacts for silicon carbide,” Mater. Sci. Eng. B 34, 83-105 (1995).
- C. Raynaud, F. Ducroquet, P. N. Brounkov, G. Guillot, L. M.
Porter, R. F. Davis, C. Jaussaud, and T. Billon, “Electrical
characterization of epitaxial 6H-SiC by admittance spectroscopy,” Mater. Sci. Technol. 12, 94-97 (1996).
- M.J. Powers, M.C. Benjamin, L.M. Porter, R.J. Nemanich, R.F.
Davis, and J.J. Cuomo, “Observation of a negative electron
affinity for boron nitride,” Appl. Phys. Lett., 67 (26),
3912-3914 (1996).
- L.M. Porter and R.F. Davis, “Issues and Status of Ohmic
Contacts for p-type Silicon Carbide,” Trans. Third International
High Temperature Electronics Conf., Vol. 1 (1996).
- J. Crofton, L. M. Porter, and J. R. Williams, “The physics
of ohmic contacts to SiC”, Phys. Stat. Sol. (b) 202,
581-603 (1997).
- T. Jang and L.M. Porter, “Electrical Characteristics
of Tantalum and Tantalum Carbide Schottky Diodes on n- and
p-type Silicon Carbide as a Function of Temperature,” Trans. of the Fourth High Temperature Electronics Conf., Albuquerque,
N.M., June 1998.
- A. Teicher, D.L. Meier, and L.M. Porter, “Investigation
of Undoped and Phosphorus-doped Silver-based Pastes for Self-doping
Ohmic Contacts to Silicon for Solar Cell Applications,” Proc. of the 9th Workshop on Crystalline Silicon Solar Cell
Materials and Processes, Breckenridge, CO, Aug. 1999.
- T. Jang, G.W.M. Rutsch, B. Odekirk and L.M. Porter, “Tantalum
Carbide Ohmic Contacts to n-type Silicon Carbide,” Appl.
Phys. Lett., 75 (25), 3956-3958 (1999).
- T. Jang, G. Rutsch, B. Odekirk and L.M. Porter, “A Comparison
of Single- and Multi-Layer Ohmic Contacts Based on Tantalum
Carbide on n-type and Osmium on p-type Silicon Carbide at
Elevated Temperatures,” Mater. Sci. Forum, Vols. 338-342,
1001-1004 (2000).
- K.C. Chang, N.T. Nuhfer, L.M. Porter and Q. Wahab, “High
Carbon Concentrations at the Silicon Dioxide – Silicon
Carbide Interface Identified by Electron Energy Loss Spectroscopy,” Appl. Phys. Lett., 77 (14), 2186-2188 (2000).
- L.M. Porter, T. Jang, T. Worren, K.C. Chang, N.A. Papanicolaou,
and J.W. Erickson, “Effects of Surface and Interlayer
Processing Conditions on Selected Ohmic Contact Metallizations
for p-type Silicon Carbide,” in Silicon Carbide – Materials, Processing and Devices (Materials Research Society,
Warrendale, PA, 2001) p. H7.1.
- T. Jang, B. Odekirk, and L.M. Porter, “Investigation
of Factors Limiting the High Temperature Stability of W/WC/TaC/SiC
Ohmic Contacts to n-type 6H-SiC,” in Silicon Carbide
– Materials, Processing and Devices (Materials Research
Society, Warrendale, PA, 2001) p. H7.4.
- K.C. Chang, Q. Wahab, and L.M. Porter, “Observation
of a Non-stoichiometric Layer at the Silicon Dioxide –
Silicon Carbide Interface: Effect of Oxidation Temperature
and Post-Oxidation Processing Conditions,” in Silicon
Carbide – Materials, Processing and Devices (Materials
Research Society, Warrendale, PA, 2001) p. H5.45.
- T. Jang, B. Odekirk, L.D. Madsen and L.M. Porter, “Investigation
of Thermal Stability and Contact Degradation Mechanisms of
TaC Ohmic Contacts with W/WC Overlayers to n-type 6H SiC,” J. Appl. Phys. 90, 4555-4559 (2001).
- L.M. Porter, A. Teicher and D.L. Meier, “Phosphorus-Doped,
Silver-Based Pastes for Self-Doping Ohmic Contacts for Crystalline
Silicon Solar Cells,” Solar Energy Materals and Solar
Cells, 73 (2), 209-219 (2002).
- T. Jang, J.W. Erickson and L.M. Porter, “Effects of
Si Interlayer Conditions on Platinum Ohmic Contacts for p-type
Silicon Carbide,” J. Electron. Mater. 31 (5), 506-511
(2002).
- O. Shigiltchoff, T. Kimoto, D. Hobgood, P.G. Neudeck, L.M.
Porter, R.P. Devaty and W.J. Choyke, “Schottky Barriers
for Pt on 6H and 4H SiC (0001), (000-1), (1-100) and (1-210)
Faces Measured by I-V, C-V and Internal Photoemission,” (presented at the Int. Conf. on Silicon Carbide and Rel. Mater.,
Tskuba, Japan, Oct. 2001), Mater. Sci. Forum, Vols. 389-393,
pp. 921-924 (2002).
- O. Shigiltchoff, S. Bai, R.P. Devaty, W.J. Choyke, T. Kimoto,
D.Hobgood, P.G. Neudeck and L. M. Porter, “Schottky
Barriers for Pt, Mo and Ti on 6H and 4H SiC (0001), (000-1),
(1-100) and (1-210) Faces Measured by I-V, C-V and Internal
Photoemission,” to be published in Proc. of the European
Conf. on Silicon Carbide and Rel. Mater., Linköping,
Sweden, Sept. 2002.
- S. Bai, Y. Ke, Y. Shishkin, O. Shigiltchoff, R.P. Devaty,
W.J. Choyke, D. Strauch, B. Stojetz, B. Dorner, D. Hobgood,
J. Serrano, M. Cardona, H. Nagasawa, T. Kimoto and L.M. Porter, “Four Current Examples of Characterization of Silicon
Carbide,” in Silicon Carbide – Materials, Processing
and Devices (Materials Research Society, Warrendale, PA) Vol.
742, p. K3.1 (2003).
- Aravind Asthagiri, Christoph Niederberger, Andrew J. Francis,
Lisa M. Porter, Paul A. Salvador, and David S. Sholl, “Thin
Pt films on the polar SrTiO3(111) surface: an experimental
and theoretical study,” Surf. Sci., 537, 134 -152 (2003).
- K.-C.
Chang, J. Bentley and L.M. Porter, “Nanoscale characterization
of the silicon dioxide – silicon carbide interface using
elemental mapping by energy-filtered transmission electron
microscopy,” J. Electron. Mater., 32, 464-469 (2003).
- L.M. Porter and F.A. Mohammad, “Review of Issues Pertaining
to the Development of Contacts to Silicon Carbide: 1996–2002,”in
Silicon Carbide (SiC) Microelectromechanical Systems (MEMS)
for Harsh Environments,” (Imperial College Press), in
press.
- K.-C. Chang, L.M. Porter, J. Bentley, C.-Y. Lu, and J. Cooper,
Jr., “Electrical, structural and chemical analysis of
silicon carbide-based metal-oxide-semiconductor field-effect-transistors,” J. Appl. Phys., 95, 8252-8257 (2004).
- S. Dhar, L.C. Feldman, K.-C. Chang, Y. Cao, L.M. Porter, J. Bentley, and J.R. Williams, “Nitridation anisotropy in SiO2/4H-SiC,” J. Appl. Phys. 97, 074902.1 – 07902.6 (2005).
- K.-C. Chang, Y. Cao, L. M. Porter, J. Bentley, S. Dhar, L.C. Feldman , and J.R. Williams, “High Resolution Elemental Profiles of the Silicon Dioxide/4H-Silicon Carbide Interface,” J. Appl. Phys. 97, 104920.1-104920.6 (2005).
- F. A. Mohammad, Y. Cao, K.-C. Chang and L. M. Porter, “Comparison of Pt-based Ohmic Contacts with Ti-Al Ohmic Contacts for p-type SiC,” Jpn. J. Appl. Phys. 44, 5933-5938 (2005).
- F.A. Mohammad and L.M. Porter, “Ohmic Contacts to Silicon Carbide Determined by Changes in the Surface,” Appl. Phys. Lett. 87, 161908.1-161908.3 (2005).
- K.R. Balasubramanian, F.A. Mohammad, K.-C. Chang, L.M. Porter, P.A. Salvador, P.Q. Miraglia, and R.F. Davis, “Structural Investigations of Hexagonal YMnO3 Thin Films Synthesized on Wurtzite GaN(001),” to be published in Thin Solid Films.
- D.J. Ewing, Q. Wahab, S. Tumakha, L.J Brillson, X. Ma, T.S. Sudarshan, and L.M. Porter, “A Study of Inhomogeneous Schottky Diodes on N-Type 4H-SiC,” to be published in the Proc. of the International Conference on Silicon Carbide and Related Materials, Pittsburgh, PA, September 2005.
- S. Tumakha, L.J. Brillson, D.J. Ewing, L.M. Porter, Q. Wahab, X. Ma, and T.S. Sudarshan, “Nanoscale Deep Level Defect Correlation with Schottky Barriers in 4H-SiC/Metal Diodes,” to be published in the Proc. of the International Conference on Silicon Carbide and Related Materials, Pittsburgh, PA, September 2005.
- S.T. Pantelides, S. Wang, A. Franceschetti, R. Buczko, M. Di Ventra, S.N. Rashkeev, L. Tsetseris, M.H. Evans, I.G. batyrev, L.C. Feldman, S. Dhar, K. McDonald, R.A. Weller, R.D. Schrimpf, D.M. Fleetwood, X.J. Zhou, J.R. Williams, C.C. Tin, G.Y. Chung, T. Isaacs-Smith, S.R. Wang, S.J. Pennycook, G. Duscher, K. Van Benthem, L.M. Porter, and J.A. Cooper, Jr., “Si/SiO2 and SiC/SiO2 Interfaces for MOSFETs – Challenges and Advances,” to be published in the Proc. of the International Conference on Silicon Carbide and Related Materials, Pittsburgh, PA, September 2005.
- S. Tumakha, D.J. Ewing, L.M Porter, Q. Wahab, X. Ma, T.S. Sudarshan, and L.J. Brillson, “Defect-Driven Inhomogeneities in Ni/4H-SiC Schottky Barriers,” Appl. Phys. Lett. 87, 242106.1-242106.3 (2005).
- L.M. Porter, “Thermal Stability and Defects in Contacts to Silicon Carbide,” in Wide Band Gap Materials and New Developments, Research Signpost, Kerala, India, in press.
- D.J. Ewing, L.M. Porter, Q. Wahab, X. Ma, T.S. Sudharshan, S. Tumakha, M. Gao, and L.J. Brillson, “Inhomogeneities in Ni/4H-SiC Schottky Barriers: Localized Fermi-Level Pinning by Defect States,” submitted to J. Appl. Phys.
- F.A. Mohammad, Y. Cao, and L.M. Porter, “Characterization of Epitaxial Indium Nitride Interlayers for Ohmic Contacts to Silicon Carbide,” submitted to J. Electron. Mater.
Patent
- R.C.
Glass, J. W. Palmour, R. F. Davis, and L. M. Porter, “Platinum
ohmic contact to p-type silicon carbide”, U.S. Patent
No. 5,323,022, April 25, 1995.
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